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CALIBRATION SERVICE DOCUMENTATION

C-Series Calorimeter

Q-Series Calorimeter

K-Series Calorimeter

QUV and QDUV-Series Calorimeters

BB-Series Calorimeters

Laser-Optimized Cryogenic Radiometer (LOCR)

Low Level Laser System

Frequency Response Measurement Systems

Optical Fiber Power Meter Calibration System

Spectral Responsivity Measurement System

Relative Intensity Noise (RIN) Measurement System

Detector Spatial Uniformity Measurement System

C-Series Calorimeter
This is the primary standard in a beamsplitter-based measurement system established for calibrating power/energy meters used with low to medium power cw lasers. The C-Series measurement system supports laser detector calibrations at wavelengths ranging from 325 nm to 1550 nm at powers of 1 µW to 1 W (note: the specific power ranges available vary with wavelength).
  • Thermal Modeling and Analysis of Laser Calorimeters;
    Zhang, Z.M.; Livigni, D.J.; Jones, R.D.; Scott, T.R.;
    J. Thermophys. Heat Transfer 10(2): 350-356; Apr-Jun 96


  • Laser Power and Energy Measurements and the NBS Laser Measurement Assurance Program (MAP);
    Case, W.E.; Sanders, A.A.;
    IEEE Instrumentation and Measurement Technology Conf., Mar 20-22, 1985, Tampa, FL, 281-285; 85


  • Documentation of the NBS C, K, and Q Laser Calibration Systems;
    Case, W.E.;
    NBSIR 82-1676; Sep 82


  • An NBS Laser Measurement Assurance Program (MAP);
    Sanders, A.A.; Cook, A.R.;
    Proc. Electro-Optical Systems Design Conf. 1976 and Intl. Laser Exposition, Sep 14-16, 1976, New York, NY, 277-280; 76


  • Current Status of NBS Low-Power Laser Energy Measurement;
    West, E.D.; Case, W.E.;
    Proc., Conf. On Prec. Electromagn. Meas., Jul 1-5, 1974, London, England, IEEE Trans. Instrum. Meas. IM-23: 422-425; Dec 74


  • A Reference Calorimeter for Laser Energy Measurements;
    West, E.D.; Case, W.E.; Rasmussen, A.L.; Schmidt, L.B.;
    NBS JRES, 76A: 13-26; 72.

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Q-Series Calorimeter
This is the primary standard in a beamsplitter-based measurement system established for calibrating power/energy meters used with pulsed Nd:YAG and Nd:Glass lasers. The Q-Series measurement system supports measurements on power/energy detectors at a wavelength of 1.06 µm and with pulse energies of 1 mJ - 300 mJ.
  • Absolute Reference Calorimeter for Measuring High Power Laser Pulses;
    Franzen, D.L.; Schmidt, L.B.;
    Appl. Opt. 15: 3115-3122; Dec 76


  • Calorimetric Measurement of Pulsed Laser Output Energy;
    Jennings, D.A.;
    IEEE Trans. Instrum. Meas. IM-15(4): 161-164; Dec 66

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K-Series Calorimeter
This is the primary standard in a beamsplitter-based measurement system established for calibrating power/energy meters used with high-power cw lasers. The K-series measurement system supports measurements on detectors at wavelengths of 10.6 µm (100 mW – 1kW onsite; 1 W – 6 kW offsite) and 1.06 µm (1 - 500 W onsite; 1 W – 6 kW offsite).
  • A System for Calibrating Laser Power Meters for the Range 5-1000 W";
    West, E.D.; Schmidt, L.B.;
    NBS TN 685; May 77


  • Precision Beam Splitters for CO2 Lasers;
    Franzen, D.L.;
    Appl. Opt. 14: 647-652; Mar 75
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QUV and QDUV-Series Calorimeters
These are the primary standards in beamsplitter-based measurement systems established for calibrating power/energy meters used with excimer lasers. The QUV-Series measurement system supports calibrations at a wavelength of 248 nm (5 µJ/pulse – 250 mJ/pulse; 50 µW – 7 W average power). The QDUV-Series measurement system supports calibrations at a wavelength of 193 nm (5 µJ/pulse – 5 mJ/pulse; 10 µW – 3 W average power). Dose (i.e., energy density) measurements for small-area detectors are available as Special Test. A primary standard calorimeter and associated measurement system for calibrations at a wavelength of 157 nm are currently under development.
  • Damage Testing of Partial Reflectors for 157 nm Laser Calorimeters;
    Laabs, H.; Jones, R.; Cromer, C.; Dowell, M.; Liberman, V.;
    (in progress)


  • New Developments in Deep Ultraviolet Laser Metrology for Photolithography;
    Dowell, M.L.; Cromer, C.L.; Jones, R.D.; Keenan, D.A.; Scott, T.R.;
    Proc., 2000 Intl. Conf. On Characterization and Metrology for ULSI Tech., Jun 26-29, 2000, Gaithersburg, MD, TU-29; Jun 00


  • Thermal Modeling of Calorimeters for Excimer Lasers at 193 nm Wavelength;
    Chen, D.H.; Dowell, M.L.; Cromer, C.L.; Zhang, Z.M.;
    Proc. 34th AIAA Thermophysics Conf., Jun 19-22, 00, Denver, CO; 00


  • Deep Ultraviolet Laser Metrology for Semiconductor Photolithography;
    Dowell, M.L.; Cromer, C.L.; Leonhardt, R.W.; Scott, T.R.;
    Proc. 1998 Intl. Conf. On Characterization and Metrology for ULSI Tech., May 23-27, 1998, Gaithersburg, MD, 449: 530-541; Nov 98


  • Calibration Service for Laser Power and Energy at 248 nm;
    Leonhardt, R.W.;
    NIST TN 1394, 34 pp; Jan 98

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BB-Series Calorimeters
These are primary standards used for very high-power cw laser measurements. The calorimeters were originally built (and still supported) by NIST but are routinely operated and maintained by the Air Force Primary Standards Laboratory in Heath, OH. The calorimeters are used with a spinning, reflective chopper-wheel to provide cabration measurements at powers of 100 W – 100 kW with cw lasers emitting radiation in the IR wavelength region (predominately at 10.6 µm).
  • Improvements in a Calorimeter for High-Power CW Lasers;
    Chamberlain, G.E.; Simpson, P.A.; Smith, R.L.;
    IEEE Trans. Instrum. Meas. IM-27: 81-86; Mar 78


  • A Calorimeter for High-Power CW Lasers;
    Smith, R.L.; Russell, T.W.; Case, W.E.; Rasmussen, A.L.;
    IEEE Trans. Instrum. Meas. IM-21: 434-438; Nov 72

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Laser-Optimized Cryogenic Radiometer (LOCR)
This is the primary standard used for performing high-accuracy (i.e., < 0.1% expanded uncertainty) calibrations of cw-laser power meters. Absolute power measurements are performed with stabilized cw lasers at the following wavelengths (in vacuum): 458.06, 476.62, 488.13, 496.65, 514.67, 632.99, 1319.09, and 1550.42 nm. These high-accuracy calibrations are available in the 100 µW – 1 mW power range.
  • Cryogenic Radiometer-Based High-Accuracy Laser Power Calibration Service
    (in progress)


  • Thermal Characterization of a Cryogenic Radiometer and Comparison with a Laser Calorimeter;
    Livigni, D.J.; Cromer, C.L.; Scott, T.R.; Johnson, B.C.; Zhang, Z.M.;
    Metrologia 35: 819-827; 98


  • Heat Transfer and Modeling of a Cryogenic Laser Radiometer;
    Johnson, B.C.; Kumar, A.R.; Zhang, Z.M.; Livigni, D.J.; Cromer, C.L.; Scott, T.R.;
    J. Themophys. And Heat Transfer 12(4): 575-581; Oct-Dec 98

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Low Level Laser System

Provides calibrations on detectors used to measure energy and peak power of laser pulses at very low levels. The measurement system uses a fused silica, multiple-reflection, wedged beamsplitter and thermal-detector transfer standard (traceable to the C-Series Calorimeter) to provide measurements at 1064 nm (10-4 – 10-8 W; 10-11 – 10-15 J/pulse) and 1554 nm (in process).

  • Calibration Service for Peak Power and Energy of Low-Level 1.06 µm Laser Pulses;
    Leonhardt, R.;
    (documentation in progress)


  • Low-Level Pulsed 1064 nm Laser Radiometer Transfer Standard;
    Leonhardt, R.W.;
    Proc., SPIE, Vol 2815, The International Society for Optical Engineering, Optical Radiation Measurements III, Aug 4-9, 1996, Denver, CO: 154-159; Aug 96
  • Improved Low-Level Silicon Avalanche Photodiode Transfer Standards at 1064 Micrometers;
    Rasmussen, A.L.; Sanders, A.A.; Simpson, P.A.;
    NISTIR 89-3917, 39 pp; Aug 22, 89


  • Fast Pulse Generators and Detectors for Characterizing Laser Receivers at 1.06 µm;
    Simpson, P.A.;
    Proc., SPIE, Vol 888: 43-47; 88


  • Laser Standards for Energy and Power of Low-Level 1.064 µm Laser Pulses and CW;
    Rasmussen, A.L.; Sanders, A.A.;
    Opt. Eng. 25(2): 277-285; Feb 86


  • Documentation of the NBS APD and PIN Calibration Systems for Measuring Peak Power and Energy of Low-Level 1.064 µm Laser Pulses;
    Rasmussen, A.; Sanders, A.A.;
    NBSIR 85-3032, 67 pp; Dec 85


  • A System for Measuring Energy and Peak Power of Low-Level 1.064 µm Laser Pulses;
    Sanders, A.A.; Rasmussen, A.L.,
    NBS TN 1058; Oct 82


  • Measurement Procedures for the Optical Beam Splitter Attenuation Device BA-1;
    Danielson, B.L.;
    NBSIR 77-858; May 77


  • Laser Attenuators for the Production of Low Power Beams in the Visible and 1.06 Micron Regions;
    Danielson, B.L.; Beers, Y.;
    NBS TN 677; Jan 7

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Frequency Response Measurement Systems
Provides traceable frequency response measurements (magnitude) on optical receivers. These laser heterodyne-based systems support measurements at 850 nm (1 MHz – 54 GHz), 1319 nm (300 kHz – 50 GHz), and 1550 nm (100 kW – 50 GHz). Work is in progress to extend measurement capability to provide both magnitude and phase to > 100 GHz. Reference receiver impulse response measurements are available at 800 and 1550 nm (100 fs impulse sources) as a Special Test.
  • Measuring the Frequency Response of Gigabit Chip Photodiodes;
    Hale, P.D.; Clement, T.S.; Williams, D.F.; Balta, E. Taneja, J.D.;
    J. Lightwave Tech. 19(9): 1333-1339: Sep 01


  • Frequency Response Metrology for High-Speed Optical Receivers;
    Hale, P.D.; Clement, T.S.; Williams, D.F.;
    Tech. Dig., Optical Fiber Communication Conf. (OFC’01), Mar 17-22, 2001, Anaheim, CA, WQ1-1-3, Mar 01


  • Heterodyne System at 850 nm for Measuring Photoreceiver Frequency Response;
    Hale, P.D.; Wang, C.-M.;
    Tech. Dig., Symp. On Optical Fiber Meas., in NIST SP 953, 117-120; Sep 00


  • Time-Domain Measurement of the Frequency Response of High-Speed Photoreceivers to 50 GHz;
    Clement, T.S.; Hale, P.D.; Coakley, K.C.; Wang, C.-M;
    Tech. Dig., Symp. on Optical Fiber Meas., in NIST SP 953, 121-124; Sep 00


  • Calibration Service of Optoelectronic Frequency Response at 1319 nm for Combined Photodiode/rf Power Sensor Transfer Standards;
    Hale, P.D.; Wang, C.-M.;
    NIST SP 250-51, 47 pp; Dec 99


  • A Transfer Standard for Measuring Photoreceiver Frequency Response;
    Hale, P.D., Wang, C.-M.; Park, R.; Lau, W.Y.;
    J. Lightwave Tech. 14(11): 2457-2466; Nov 96

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Optical Fiber Power Meter Calibration System

Provides calibrations of optical fiber power meters at 100 µW for the following nominal wavelengths: 670 nm, 780 nm, 850 nm, 980 nm, 1310 nm, 1550 nm, and 1615 nm. An electrically calibrated pyroelectric radiometer (ECPR) is used as the laboratory transfer standard (traceable to the LOCR). For high power applications, the following Special Test measurements are available: 100 mW at 980 nm; 250 mW at 1310 nm (in progress); and 250 mW at 1550 nm (in progress).

At wavelengths of 850, 1310, and 1550 nm, a Nonlinearity Measurement System provides capability to extend the absolute responsivity measurements 60 – 90 dB down from the 100 µW mentioned above.

  • Optical Fiber Power Meter Nonlinearity Calibrations at NIST;
    Vayshenker, I.; Yang, S.; Li, X.; Scott, T.R.; Cromer, C.L.;
    NIST SP 250-56, 29 pp; Aug 00


  • NIST Measurement Services: Optical Fiber Power Meter Calibrations at NIST;
    Vayshenker, I.; Li, X.; Livigni, D.J.; Scott, T.R.; Cromer, C.L.;
    NIST SP 250-54, 36 pp; Jun 00


  • FO Connector Types Affect Power Measurements;
    Vayshenker, I.; Li, X.; Keenan, D.A.; Scott, T.R.;
    Test Meas. World: 23 & 25; Feb 97


  • Errors Due to Connectors in Optical Fiber Power Meters;
    Vayshenker, I.; Li, X.; Keenan, D.A.; Scott, T.R.;
    Tech. Dig., Symp. on Optical Fiber Meas., in NIST SP 905, 49-52; Oct 96


  • Nonlinearity of Optical Fiber Power Meters;
    Vayshenker, I.; Yang, S.; Li, X.; Scott, T.R.;
    Tech. Dig., Symp. on Optical Fiber Meas., in NIST SP 905, 101-104; Oct 96


  • Automated Measurements of Nonlinearity of Optical Fiber Power Meters;
    Vayshenker, I.; Yang, S.; Li, X.; Scott, T.R.;
    Proc., SPIE, Vol 2550, Photodetectors and Power Meters II, Jul 9-14, 1995, San Diego, CA: 12-19; 95


  • Optical Detector Nonlinearity: Simulation;
    Yang, S.; Vayshenker, I.; Li, X.; Zander, M.; Scott,
    T.R.; NIST TN 1376, 36 pp; May 95


  • Optical Power Meter Calibration Using Tunable Laser Diodes;
    Vayshenker, I.; Li, X.; Scott, T.R.;
    Proc., Natl. Conf. Stds. Labs., Jul 31-Aug 4, 1994, Chicago, IL, 363-372; Jul 94


  • On the Calibration of Optical Fiber Power Meters: The Effect of Connectors;
    Gallawa, R.L.; Li, X.;
    Appl. Opt. 26(7): 2967-2975; Sep 86


  • An Electrically Calibrated Pyroelectric Radiometer System;
    Hamilton, C.A.; Day, G.W.; Phelan, R.J., Jr.;
    NBS TN 678; Mar 76


  • Electrically Calibrated Pyroelectric Optical-Radiation Detector;
    Phelan, R.J., Jr.; Cook, A.R.;
    Appl. Opt. 10: 2494-2500; Oct 73

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Spectral Responsivity Measurement System

Is used to provide spectral responsivity calibration services over the wavelength range 400 – 1700 nm for optical detectors. The system uses a wedge-trap pyroelectric detector (traceable to the C-Series Calorimeter) as the laboratory transfer standard along with a monochromator and lamp source to project radiation with known spectral content onto the test detector. For detectors used with optical fibers attached, the results from this system are correlated to measurements performed using the optical fiber power measurement system.

  • Optical Tunnel-Trap Detector for Radiometric Measurements;
    Lehman, J.H.; Cromer, C.L.;
    Metrologia 37: 477-480; 00
  • Calibration Service for Spectral Responsivity of Laser and Optical-Fiber Power Meters at Wavelengths Between 0.4 µm and 1.8 µm;
    Lehman, J.;
    NIST SP 250-53, 39 pp; Dec 99
  • A Transfer Standard for Optical Fiber Power Metrology;
    Lehman, J.; Li, X.;
    Opt. and Phot. News, Eng. and Lab. Notes, 10(5), 44f-h; May 99
  • Pyroelectric Trap Detector for Spectral Responsivity Measurements;
    Lehman, J.;
    Opt. Photon. News 8(11); 35-36, Appl. Opt. 36(34), 97; Nov 97
  • Spectral Reference Detector for the Visible to 12 Micrometer Region Convenient Spectrally Flat;
    Day, G.W.; Hamilton, C.A.; Pyatt, K.W.;
    Appl. Opt. 15: 1865-1868; Jul 76

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Relative Intensity Noise (RIN) Measurement System
Provides calibration and Measurement Assurance Program (MAP) services for the measurement of laser RIN in the wavelength region of 1550 nm over the 0.1 – 4.1 GHz frequency band. An erbium-doped fiber amplifier coupled to a linear polarizer and narrow-band filter, centered in the 1550 nm wavelength range, is used as a RIN transfer standard.
  • How to Measure Relative Intensity Noise in Lasers;
    Obarski, G.E.; Hale, P.D.;
    Laser Focus World 35(5): 273-277; May 99


  • Transfer Standard for the Spectral Density of Relative Intensity Noise of Optical Fiber Sources Near 1550 nm;
    Obarski, G.E.; Splett, J.D.;
    J. Opt. Soc. Am. B 18(6): 650-761, Jun 01


  • Measurement Assurance Program for the Spectral Density of Relative Intensity Noise of Optical Fiber Sources near 1550 nm;
    Obarski, G.E.; Splett, J.D.;
    NIST SP 250-57, 90 pp; Sep 00

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Detector Spatial Uniformity Measurement System

Provides Special Test services for determining detector responsivity as a function of position on the detector’s surface. The measurement system uses diode lasers and an optical fiber-based delivery system to perform uniformity scanning measurements on detectors at wavelengths of 635, 850, 1300, and 1550 nm.

  • Spatial Uniformity of Optical Detector Responsivity;
    Livigni, D.J.; Li, X.;
    Proc., Natl. Conf. Stds. Labs., Jul 31-Aug 4, 1994, Chicago, IL, 337-352; Jul 94

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